Stainless steel vacuum reaction tank, firm and durable.
1.2 meters diameter vacuum reaction tank is able to do coating with large quantity products or big product.
The side open door design is convenient to put in and take out products and easy to do maintenance.
The turntable mechanism inside the reaction tank makes the product rotate during the coating process and the coating layer is more uniform.
Display the vacuum degree with digital LED vacuum meter.
All the vacuum tubes adopt stainless steel joint for easy maintenance.
Easy to operate, can choose auto/manual mode.
Infrared heating ring ensures fast heating up.
Adopt high - precision temperature control device.
Protective functions such as alarm and automatic stop of over-temperature.
Self-diagnosis function and all kinds of fault alarm.
Application
Horizontal vacuum chemical vapor deposition machine is a Parylene coating equipment used for waterproof protection of electronic products. Chemical vapor deposition (CVD) is a process of depositing a 0.1-100um film coating on the surface of a product by means of sublimation pyrolysis of a compound (long-chain polymer material) containing membrane elements in the vacuum reaction chamber where product is placed. After the coating, the electronics will have high-dielectric strength and excellent resistance to high and low temperature(-100-200 degree C), anti-corrosion, acid and alkali resistant, lubricating, resistant to dust, moisture and rust.
CVD is wildly used in aviation, PCBA, LED, magnetic material, sensors, silicon rubber, sealing element, medical equipment, precious cultural relics and etc.
Specification
Machine dimension (L*W*H)/ Weight | 3000 mm x 1420 mm x 1620mm 118.11 in x 55.91 in x 63.78 in |
External diameter of reaction tank | ø1210x1240 mm | ø47.63 in x 48.82 in |
Reaction tank mouth size | 890 x 1200 mm |
Electricity | 3 phases, 380 VAC / 50 Hz |
Max power | 15 Kw |
Temperature control zone | 6 |
Decomposing furnace temperature control | Room temperature to 700℃ |
Sublimation furnace temperature control | Room temperature to 150℃ |
Material door temperature control | Room temperature to 250 |
Refrigeration compressor power | 1000 W |
Cooling capacity | 887 W |
Minimum refrigerating temperature | -90℃ |
Vacuum pump model | 2RH 090C |
Speed ratio of suction | 90 m³ |
Maximum vacuum pressure | ≤ 5 Pa |
Motor power of vacuum pump | 3.7 KW (3 phases, 380 VAC) |
Motor speed of vacuum pump | 1440 R/Min |
Control system | 10 ”HMI，PLC |
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Dimension
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